Woodruff School of Mechanical Engineering

Mechanical Engineering Seminar


Building Microscale Electro Mechanical Interfaces


Dr. Levent Degertekin


Ga. Institute of Technology


Tuesday, February 23, 2010 at 11:00:00 AM


MRDC Building, Room 4211


Dr. Michael Leamy


In this talk, we summarize some of our current efforts in building micro electro mechanical systems and devices for medical ultrasound imaging and atomic force microscopy (AFM), and discuss challenges leading to future directions. We first describe capacitive micromachined ultrasonic transducers (CMUTs) as an enabling technology for medical ultrasound imaging in cardiology and describe single silicon chip CMUT based imaging arrays with monolithically integrated CMOS electronics as an example of higher level system integration. We then focus on several challenges of CMUTs including harmonic generation and cross-talk and future possibilities in photoacoustic imaging. As an example of an interface device bridging microscale to nanoscale and biological systems, we describe the FIRAT probe for AFM. We use this probe for fast, quantitative imaging of surfaces, and improved measurement of single molecular mechanics. We conclude by discussing the fabrication challenges and possible future versions and applications of the FIRAT probe.


This lecture is the first in a new internal lecture series being sponsored by the Faculty Development Committee. Dr. Degertekin is the George W. Woodruff Chair in Mechanical Systems and Professor of Mechanical Engineering. His research areas and descriptors are Microelectromechanical Systems and Acoustics and Dynamics; Micromachined ultrasonic and opto-acoustic transducers, atomic force microscopy, and medical ultrasound imaging. Dr. Degertekin worked in the area of acoustic microscopy, ultrasonic sensors for semiconductor processing and modeling of wave propagation in layered media before focusing on microscale devices. Dr. Degertekin began at Georgia Tech in 2000 as an Assistant Professor. Prior, he was an Engineering Research Associate at the E. L. Ginzton Laboratory at Stanford University.