The Woodruff School

SUMMARY

Matthew Henry is currently a Ph.D. candidate in the Mechanical Engineering Department working in Dr. Fedorov’s research group on the advancement of Focused Electron Beam Induced Deposition (FEBID). FEBID is a rapidly developing field of nanofabrication which allows 3D additive manufacturing at a resolution comparable to electron beam lithography. Emerging applications include MEMS sensors, 3D nano-scale superconductors, and even memory storage (nano magnetics). However, ongoing challenges to the field of FEBID are low deposition rate and low deposit purity. An innovative approach to FEBID has been developed that uses a continuum gas jet to deliver deposition precursor molecules. Interaction between the continuum gas jet and the substrate are demonstrated to both enhance growth rates and deposit purity. Predictive modeling of the gas-surface interaction is developed to determine the effective temperature of surface adsorbed molecules, which determines the surface diffusion rate and growth rate.

SUBJECT:	Ph.D. Dissertation Defense

BY:	Matt Henry

TIME:	Wednesday, April 25, 2018, 11:00 a.m.

PLACE:	MRDC Building, 4211

TITLE:	The Theoretical Characterization, Design, and Simulation of a Gas Jet Injection System to Enhance Growth Conditions in Focused Electron Beam Induced Deposition

COMMITTEE:	Dr. Andrei Fedorov, Chair (ME) Dr. Cyrus Aidun (ME) Dr. Satish Kumar (ME) Dr. Vladimir Tsukruk (MSE) Dr. Seung Soon Jang (MSE)

SUMMARY Matthew Henry is currently a Ph.D. candidate in the Mechanical Engineering Department working in Dr. Fedorov’s research group on the advancement of Focused Electron Beam Induced Deposition (FEBID). FEBID is a rapidly developing field of nanofabrication which allows 3D additive manufacturing at a resolution comparable to electron beam lithography. Emerging applications include MEMS sensors, 3D nano-scale superconductors, and even memory storage (nano magnetics). However, ongoing challenges to the field of FEBID are low deposition rate and low deposit purity. An innovative approach to FEBID has been developed that uses a continuum gas jet to deliver deposition precursor molecules. Interaction between the continuum gas jet and the substrate are demonstrated to both enhance growth rates and deposit purity. Predictive modeling of the gas-surface interaction is developed to determine the effective temperature of surface adsorbed molecules, which determines the surface diffusion rate and growth rate.