SUMMARY

Piezoresistive microcantilevers can be used for the detection of biological and chemical substances by measuring the change in surface stress. Design parameters for the cantilever and piezoresistor dimensions were investigated analytically and through finite element modeling. Based on these results, six optimized cantilever types were designed and a microfabrication process was developed. The electrical and mechanical properties of the fabricated devices as well as their deflection and surface stress sensitivities were characterized and compared to the models. A second generation of cantilevers that incorporates heater areas to trigger or enhance chemical reactions was designed and fabricated. In addition to the measurements done for the first generation devices, the thermal properties of these microcantilevers were characterized.