SUMMARY

Metal Organic Frameworks (MOFs) are a new class of nanoporous materials with high surface area, thermal/chemical stability and a taylorable pore size. These properties make MOFs ideal for storage and gas separation applications. Piezoresistive microcantilever sensors are microfabricated devices that are highly sensitive to surface strain due to doped single crystal silicon regions. Layer by layer deposition of MOFs on piezoresistive cantilevers results in a highly sensitive, reversible gas sensor with selectivity to different volatile organic compounds (VOC). Such as sensors were shown to be durable, reliable and stable in long term testing and show promise in providing a future solution for a next generation gas sensor.