SUMMARY

A comparative study was conducted between anisotropically etched silicon microchannels with carbon nanotubes grown on the bottom surface of the channel and geometrically similar microchannels without carbon nanotubes for electronic cooling applications. The samples were evaluated based on the fluid temperature rise through the channels, the silicon surface temperature increase above ambient, and the pressure drop. The height and deposition pattern of the nanotubes are parameters investigated in this study. Water as the working fluid was passed through the microchannels at two different volumetric flow rates (16 mL/min and 28 mL/min). Additionally, two different heat fluxes were applied to the backside of the microchannel (10 W/cm2 and 30 W/cm2). Extensive validation of the baseline channels was carried out using a numerical model, an analytical model, and repeatability tests. Finally, the benefit of using carbon nanotubes for single-phase, laminar, internal, forced convection was investigated in regard to the additional surface area created by the carbon nanotubes, as well as their high thermal conductivity.