SUMMARY

Wafer handling robotics are critical in semiconductor manufacturing to tightly control temperature, humidity, and particle contamination during processing. Closed-loop dynamic modeling during the robot design process ensures designs meet throughput and stability specifications prior to prototype hardware purchase. Dynamic models are also used to improve performance through model-based control. This thesis describes the generation and mathematical verification of a dynamic model for a 3 degree-of-freedom robot with one linear and two rotary axes. The dynamic plant model is integrated with motion and motor controller models, and the closed-loop performance is compared with experimental data.