SUBJECT: M.S. Thesis Presentation
BY: Elaina Babayan
TIME: Thursday, November 6, 2014, 2:30 p.m.
PLACE: Love Building, 210
TITLE: High Fidelity Closed-Loop Model for 3 Degree-of-Freedom Vacuum Mechanism Dynamics
COMMITTEE: Dr. Harvey Lipkin, Chair (ME)
Dr. Chris Paredis (ME)
Mr. Robert Mitchell (Applied Materials Varian Semiconductor)


Wafer handling robotics are critical in semiconductor manufacturing to tightly control temperature, humidity, and particle contamination during processing. Closed-loop dynamic modeling during the robot design process ensures designs meet throughput and stability specifications prior to prototype hardware purchase. Dynamic models are also used to improve performance through model-based control. This thesis describes the generation and mathematical verification of a dynamic model for a 3 degree-of-freedom robot with one linear and two rotary axes. The dynamic plant model is integrated with motion and motor controller models, and the closed-loop performance is compared with experimental data.