SUMMARY

Low noise, directional microphones are critical for hearing aid applications. This thesis is focused on further development of a biomimetic micromachined directional microphone based on the ear structure of the Ormia Ochracea, a parasitic fly able to locate sound sources in the audio frequency range with high accuracy. The development efforts have been on implementing a version of the microphone for a behind the ear (BTE) package while improving the overall optical efficiency and noise level, demonstrating pulsed laser operation for reduced power consumption, and electrostatic control of the microphone diaphragm position for stable operation over a long time.